세라믹 정전척

Ceramic ESC
세라믹 정전척은 당사 특허에 의거하여 제작된 제품이며, 고순도 소재를 사용하여 내전압 특성이 뛰어납니다.
Specifications
Model Name JB-A-001 JW-Z-001 CI-A-001 SW-T-001
Color Black White Ivory White
Dimensions Dielectric Material Thickness 1 ~ 3T 1 ~ 2T 1T 0.15 ~ 0.5T
Wafer Size Compatibility ≤ 12”
Operating Temperature -20 °C to 100 °C
Operating Voltage ~ 3 kV DC ~ 3 kV DC ~ 5 kV DC ~ 3 kV DC
Chucking Force ≤ 20 gf/㎠ ≤ 20 gf/㎠ ≤ 10 gf/㎠ ≤ 30 gf/㎠
Surface Flatness ≥ 20 ㎛
Surface Roughness (Ra) ≥ 0.1 ㎛ -
Ceramic Characteristics Compressive Strength ≥ 1,000 Mpa ≥ 1,000 Mpa ≥ 1,000 Mpa ≥ 1,000 Mpa
Heat Shock Strength ≥ △ 200 ℃ ≥ △ 200 ℃ ≥ △ 200 ℃ ≥ △ 100 ℃
Applications Etching / Inspecting / Measurement / Packaging Process in Semiconductor
Figures
According to Surface Roughness
According to Thickness
Comparison with J-R and Coulomb